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To apply ELID grinding–CMP to hard–brittle materials, a 2 in radius 4H–SiC wafer, a 2 in radius sapphire wafer and a 10×10 mm 2 GaN wafer were prepared. An in-feed grinding machine (HSG-10A2, Nachi-Fujikoshi Corp., Japan) was used for the ELID in-feed grinding process, as shown in Fig. 3(a).
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